Dr. S. Balakumar
National Centre for Nanoscience and Nanotechnology
University of Madras Maraimalai (Guindy) Campus
Chennai-600025
Dr. Balakumar is the director of National Centre for Nanoscience and Nanotechnology, Madras University. He has several awards and patents to his credit such as IME Team Excellence Award on Nanowires project, 2008
IME Long Term Service award, 2007
IEEE Senior Membership Award, 2004
JSPS Fellowship, Japan 2000
STA Fellowship, 2001
NSTB Fellowship by Singapore A-Star -1997-1999
CUHK University fellowship (1995-97)
CSIR Research Fellowship to carry out Ph.D, 1994
CSIR Travel Award to attend IMf1993, USA
DST Full Travel Award to attend and Chair MRS 2009
US Patents : High Speed Nanowire Semiconductor Devices based on Hetero structure and formation of Such ( Patent filed, 2007)
U.S. Patent:High K artificial lattices for capacitor applications to use in CU or AL BEOL, Patent No. 6,830,971
U.S. Patent Linear polishing for improving substrate uniformity, U. S Patent: 6,726,545, April 27, 2004
U.S. Patent: Multiple steps CMP polishing, U. S Patent: 6,663,472, December 16, 2003
U.S. Patent: Method to form shallow trench isolations, U.S. Patent: 6,649,486 , November 18, 2003
U.S. Patent: Method for improving oxide erosion of tungsten CMP operations, U. S. Patent: 6,569,770,, May 27, 2003
U.S. Patent: CMP uniformity, U.S. Patent: 6,248,006 June 19, 2001.
His research interests are Multifunctional Nanomaterials, Multiferroics nanomaterials, Metal Oxide Nanostructures for sensor and Photocatalytic application, Micro/Nanoelectronic Fabrication Processes, Cu-interconnects, Chemical Mechanical Planarization and Clean technology, Nanobioglasses for medical applications.
Dr. Balakumar is associated with ‘Journal of Materials NanoScience‘ as Editorial Advisory Board Member.
